IP Library › Granted Patent US 6,638,823
Granted Patent Utility
US 6,638,823 · App. 09/975,963

Ultra small size vertical MOSFET device and method for the manufacture thereof

Inventors: Wonju Cho, Seong-Jae Lee, Kyoung Wan Park
Patented Case View Patent ↗
Granted: Oct 28, 2003 Filed: Oct 15, 2001
Inventors
Wonju Cho
Seong-Jae Lee
Kyoung Wan Park
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

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Quick Facts
Patent No.
US 6,638,823
App. No.
09/975,963
Filed
2001-10-15
Granted
2003-10-28
Kind
B2