Granted Patent
Utility
US 6,638,839 · App. 10/205,481
Hot-filament chemical vapor deposition chamber and process with multiple gas inlets
Inventors:
Xunming Deng, Henry Povolny
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: Jul 25, 2002
Inventors
Xunming Deng
Henry Povolny
Assignee (at issue)
The University of Toledo
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.