Granted Patent
Utility
US 6,639,036 · App. 10/056,124
Acid-labile polymer and resist composition
Inventors:
Joohyeon Park, Dongchul Seo, YoungTaek Lim, Hyunsang Joo, SeongDuk Cho, Seongju Kim
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: Jan 24, 2002
Inventors
Joohyeon Park
Dongchul Seo
YoungTaek Lim
Hyunsang Joo
SeongDuk Cho
Seongju Kim
Assignee (at issue)
KOREA KUMHO PETROCHEMICAL CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.