Granted Patent
Utility
US 6,639,323 · App. 09/983,286
Semiconductor device and its manufacturing method
Inventors:
Yukiharu Akiyama, Tomoaki Kudaishi, Takehiro Ohnishi, Noriou Shimada, Shuji Eguchi, Asao Nishimura, Ichiro Anjo, Kunihiro Tsubosaki, Chuichi Miyazaki, Hiroshi Koyama, Masanori Shibamoto, Akira Nagai, Masahiko Ogino
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: Oct 23, 2001
Inventors
Yukiharu Akiyama
Tomoaki Kudaishi
Takehiro Ohnishi
Noriou Shimada
Shuji Eguchi
Asao Nishimura
Ichiro Anjo
Kunihiro Tsubosaki
Chuichi Miyazaki
Hiroshi Koyama
Masanori Shibamoto
Akira Nagai
Masahiko Ogino
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.
Akita Electronics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.