Granted Patent
Utility
US 6,639,415 · App. 10/273,787
Probe station having multiple enclosures
Inventors:
Ron A. Peters, Leonard Hayden, Jeffrey A. Hawkins, R. Mark Dougherty
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: Oct 17, 2002
Inventors
Ron A. Peters
Leonard Hayden
Jeffrey A. Hawkins
R. Mark Dougherty
Assignee (at issue)
Cascade Microtech, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.