Granted Patent
Utility
US 6,639,783 · App. 09/149,807
Multi-layer ceramic electrostatic chuck with integrated channel
Inventors:
Shamouil Shamouilian, You Wang, Ananda H. Kumar
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: Sep 8, 1998
Inventors
Shamouil Shamouilian
You Wang
Ananda H. Kumar
Assignee (at issue)
Applied Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.