Granted Patent
Utility
US 6,642,157 · App. 09/742,242
Film forming method and semiconductor device
Inventors:
Yoshimi Shioya, Yuichiro Kotake, Youichi Yamamoto, Tomomi Suzuki, Hiroshi Ikakura, Shoji Ohgawara, Kouichi Ohira, Kazuo Maeda
Patented Case
View Patent ↗
Granted: Nov 4, 2003
Filed: Dec 22, 2000
Inventors
Yoshimi Shioya
Yuichiro Kotake
Youichi Yamamoto
Tomomi Suzuki
Hiroshi Ikakura
Shoji Ohgawara
Kouichi Ohira
Kazuo Maeda
Assignees (at issue)
Canon Sales Co., Inc.
Semiconductor Process Laboratory Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.