Granted Patent
Utility
US 6,645,824 · App. 10/137,200
Combined optical profilometry and projection microscopy of integrated circuit structures
Inventors:
Wenge Yang, Junwei Bao, Xinhui Niu, Nickhil Jakatdar, Yasuhiro Okumoto
Patented Case
View Patent ↗
Granted: Nov 11, 2003
Filed: Apr 30, 2002
Inventors
Wenge Yang
Junwei Bao
Xinhui Niu
Nickhil Jakatdar
Yasuhiro Okumoto
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.