Granted Patent
Utility
US 6,645,883 · App. 09/863,382
Film forming method, semiconductor device and manufacturing method of the same
Inventors:
Youichi Yamamoto, Hiroshi Ikakura, Tomomi Suzuki, Yuichiro Kotake, Yoshimi Shioya, Kouichi Ohira, Shoji Ohgawara, Kazuo Maeda
Patented Case
View Patent ↗
Granted: Nov 11, 2003
Filed: May 24, 2001
Inventors
Youichi Yamamoto
Hiroshi Ikakura
Tomomi Suzuki
Yuichiro Kotake
Yoshimi Shioya
Kouichi Ohira
Shoji Ohgawara
Kazuo Maeda
Assignees (at issue)
Canon Sales Co., Inc.
Semiconductor Process Laboratory Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.