Granted Patent
Utility
US 6,649,495 · App. 10/164,709
Manufacturing method of semiconductor device
Inventors:
Yoshimi Shioya, Yuhko Nishimoto, Tomomi Suzuki, Hiroshi Ikakura, Kazuo Maeda
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Jun 10, 2002
Inventors
Yoshimi Shioya
Yuhko Nishimoto
Tomomi Suzuki
Hiroshi Ikakura
Kazuo Maeda
Assignees (at issue)
Canon Sales Co., Inc.
Semiconductor Process Laboratory Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.