Granted Patent
Utility
US 6,649,885 · App. 09/880,957
Thermal processing apparatus
Inventors:
Yoshiaki Nakagawa, Shizuka Tateishi
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Jun 15, 2001
Inventors
Yoshiaki Nakagawa
Shizuka Tateishi
Assignee (at issue)
Sumitomo Mitsubishi Silicon Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.