Granted Patent
Utility
US 6,650,459 · App. 10/216,953
Galvano-micromirror and its manufacture process
Inventor:
Satoshi Ueda
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Aug 12, 2002
Inventor
Satoshi Ueda
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.