Granted Patent
Utility
US 6,650,907 · App. 09/720,476
Method for producing a semiconductor storage device
Inventors:
Erich Kamperschroer, Uwe Schwark, Edgar Bolinth, Michael Farber, Anja Klein, Meik Kottkamp, Armin Sitte, Thomas Ulrich, Michael Benz
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Mar 22, 2001
Inventors
Erich Kamperschroer
Uwe Schwark
Edgar Bolinth
Michael Farber
Anja Klein
Meik Kottkamp
Armin Sitte
Thomas Ulrich
Michael Benz
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.