Granted Patent
Utility
US 6,651,226 · App. 09/967,114
Process control using three dimensional reconstruction metrology
Inventors:
Erik Cho Houge, John M. McIntosh, Larry E. Plew
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Sep 28, 2001
Inventors
Erik Cho Houge
John M. McIntosh
Larry E. Plew
Assignee (at issue)
Agere Systems Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.