Granted Patent
Utility
US 6,651,284 · App. 09/973,706
Scrubbing assembly for wafer-cleaning device
Inventors:
Kao-Mao Tseng, Su-Ling Tseng, Hsin-Yi Chang
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Oct 11, 2001
Inventors
Kao-Mao Tseng
Su-Ling Tseng
Hsin-Yi Chang
Assignee (at issue)
Silicon Integrated Systems Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.