Granted Patent
Utility
US 6,652,718 · App. 10/060,724
Use of RF biased ESC to influence the film properties of Ti and TiN
Inventors:
Gerard C. D'Couto, George Tkach, Michal Danek
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Jan 30, 2002
Inventors
Gerard C. D'Couto
George Tkach
Michal Danek
Assignee (at issue)
Novellus Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.