Granted Patent
Utility
US 6,653,179 · App. 09/743,899
Method for manufacturing a thin film semiconductor device, method for manufacturing a display device, method for manufacturing a thin film transistors, and method for forming a semiconductor thin film
Inventors:
Masahiro Minegishi, Yasushi Shimogaichi, Makoto Takatoku, Hisao Hayashi
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Mar 29, 2001
Inventors
Masahiro Minegishi
Yasushi Shimogaichi
Makoto Takatoku
Hisao Hayashi
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.