Granted Patent
Utility
US 6,654,155 · App. 09/724,329
Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material
Inventors:
Michel A. Rosa, Decai Sun
Patented Case
View Patent ↗
Granted: Nov 25, 2003
Filed: Nov 29, 2000
Inventors
Michel A. Rosa
Decai Sun
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.