IP Library › Granted Patent US 6,655,023
Granted Patent Utility
US 6,655,023 · App. 09/468,620

Method and apparatus for burning-in semiconductor devices in wafer form

Inventors: Benjamin N. Eldridge, Gary W. Grube, Igor Y. Khandros, Gaetan L. Mathieu
Patented Case View Patent ↗
Granted: Dec 2, 2003 Filed: Dec 21, 1999
Inventors
Benjamin N. Eldridge
Gary W. Grube
Igor Y. Khandros
Gaetan L. Mathieu
Assignee (at issue)
FormFactor, Inc.

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Quick Facts
Patent No.
US 6,655,023
App. No.
09/468,620
Filed
1999-12-21
Granted
2003-12-02
Kind
B1