Granted Patent
Utility
US 6,656,024 · App. 10/029,742
Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization
Inventors:
John M. Boyd, David Wei, Yehiel Gotkis
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Dec 21, 2001
Inventors
John M. Boyd
David Wei
Yehiel Gotkis
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.