Granted Patent
Utility
US 6,656,537 · App. 09/811,874
Plasma enhanced chemical deposition with low vapor pressure compounds
Inventors:
John D. Affinito, Gordon L. Graff, Peter M. Martin, Mark E. Gross, Eric Mast, Michael Hall
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Mar 19, 2001
Inventors
John D. Affinito
Gordon L. Graff
Peter M. Martin
Mark E. Gross
Eric Mast
Michael Hall
Assignee (at issue)
Battelle Memorial Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.