Granted Patent
Utility
US 6,657,301 · App. 10/022,352
Contact structure, method of forming the same, semiconductor device, and method of manufacturing the same
Inventors:
Kazuyoshi Maekawa, Yasuhiro Kanda
Patented Case
View Patent ↗
Granted: Dec 2, 2003
Filed: Dec 20, 2001
Inventors
Kazuyoshi Maekawa
Yasuhiro Kanda
Assignee (at issue)
MITSUBISHI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.