Granted Patent
Utility
US 6,659,116 · App. 10/319,758
System for wafer carrier in-process clean and rinse
Inventors:
Damon Vincent Williams, Glenn W. Travis
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Dec 13, 2002
Inventors
Damon Vincent Williams
Glenn W. Travis
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.