Granted Patent
Utility
US 6,660,541 · App. 10/280,117
Semiconductor device and a manufacturing method thereof
Inventors:
Masatoshi Kanamaru, Yoshishige Endo, Takanori Aono, Ryuji Kohno, Hideyuki Aoki
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Oct 23, 2002
Inventors
Masatoshi Kanamaru
Yoshishige Endo
Takanori Aono
Ryuji Kohno
Hideyuki Aoki
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.