Granted Patent
Utility
US 6,660,632 · App. 10/037,176
Method for depositing metal and metal oxide films and patterned films
Inventors:
Ross Hill, Yo Mao Shi
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Nov 8, 2001
Inventors
Ross Hill
Yo Mao Shi
Assignee (at issue)
EKC Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.