Granted Patent
Utility
US 6,660,648 · App. 09/678,418
Process for manufacture of semipermeable silicon nitride membranes
Inventors:
Paul C. Galambos, Randy J. Shul, Christi G. Willison
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Oct 2, 2000
Inventors
Paul C. Galambos
Randy J. Shul
Christi G. Willison
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.