Granted Patent
Utility
US 6,660,651 · App. 10/010,463
Adjustable wafer stage, and a method and system for performing process operations using same
Inventor:
Richard J. Markle
Patented Case
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Granted: Dec 9, 2003
Filed: Nov 8, 2001
Inventor
Richard J. Markle
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.