Granted Patent
Utility
US 6,661,016 · App. 09/887,808
Ion implantation uniformity correction using beam current control
Inventor:
Donald W. Berrian
Patented Case
View Patent ↗
Granted: Dec 9, 2003
Filed: Jun 22, 2001
Inventor
Donald W. Berrian
Assignee (at issue)
Proteros, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.