Granted Patent
Utility
US 6,664,188 · App. 09/916,130
Semiconductor wafer with a resistant film
Inventor:
Terence M. Thomas
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Jul 26, 2001
Inventor
Terence M. Thomas
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.