Granted Patent
Utility
US 6,664,497 · App. 10/143,070
Toroidal low-field reactive gas source
Inventors:
Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: May 10, 2002
Inventors
Donald K. Smith
Xing Chen
William M. Holber
Eric Georgelis
Assignee (at issue)
Applied Science & Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.