Granted Patent
Utility
US 6,664,738 · App. 10/083,381
Plasma processing apparatus
Inventors:
Masatsugu Arai, Ryujiro Udo, Naoyuki Tamura, Masanori Kadotani, Motohiko Yoshigai
Patented Case
View Patent ↗
Granted: Dec 16, 2003
Filed: Feb 27, 2002
Inventors
Masatsugu Arai
Ryujiro Udo
Naoyuki Tamura
Masanori Kadotani
Motohiko Yoshigai
Assignees (at issue)
HITACHI, LTD.
Hitachi High-Technologies Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.