Granted Patent
Utility
US 6,667,198 · App. 10/205,317
Method and photo mask for manufacturing an array substrate
Inventors:
Shigeyuki Shimoto, Shuichi Uchikoga
Patented Case
View Patent ↗
Granted: Dec 23, 2003
Filed: Jul 26, 2002
Inventors
Shigeyuki Shimoto
Shuichi Uchikoga
Assignee (at issue)
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.