IP Library › Granted Patent US 6,667,212
Granted Patent Utility
US 6,667,212 · App. 10/394,565

Alignment system for planar charge trapping dielectric memory cell lithography

Inventors: Hidehiko Shiraiwa, Jean Y. Yang, Kouros Ghandehari
Patented Case View Patent ↗
Granted: Dec 23, 2003 Filed: Mar 21, 2003
Inventors
Hidehiko Shiraiwa
Jean Y. Yang
Kouros Ghandehari
Assignees (at issue)
Advanced Micro Devices, Inc.
Fujitsu Limited

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Quick Facts
Patent No.
US 6,667,212
App. No.
10/394,565
Filed
2003-03-21
Granted
2003-12-23
Kind
B1