Granted Patent
Utility
US 6,667,218 · App. 09/257,899
Enhancing semiconductor structure surface area using HSG and etching
Inventor:
Thomas A. Figura
Patented Case
View Patent ↗
Granted: Dec 23, 2003
Filed: Feb 25, 1999
Inventor
Thomas A. Figura
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.