Granted Patent
Utility
US 6,667,236 · App. 10/462,845
Method of manufacturing a two layer liner for dual damascene vias
Inventors:
Petrus Maria Meijer, Cornelis Adrianus Henricus Antonius Mutsaers
Patented Case
View Patent ↗
Granted: Dec 23, 2003
Filed: Jun 16, 2003
Inventors
Petrus Maria Meijer
Cornelis Adrianus Henricus Antonius Mutsaers
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.