Granted Patent
Utility
US 6,667,238 · App. 09/545,504
Polishing method and apparatus
Inventors:
Norio Kimura, Mitsuhiko Shirakashi, Katsuhiko Tokushige, Masao Asami, Naoto Miyashita, Masako Kodera, Yoshitaka Matsui, Soichi Nadahara, Hiroshi Tomita
Patented Case
View Patent ↗
Granted: Dec 23, 2003
Filed: Apr 7, 2000
Inventors
Norio Kimura
Mitsuhiko Shirakashi
Katsuhiko Tokushige
Masao Asami
Naoto Miyashita
Masako Kodera
Yoshitaka Matsui
Soichi Nadahara
Hiroshi Tomita
Assignees (at issue)
EBARA CORPORATION
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.