Granted Patent
Utility
US 6,670,081 · App. 09/877,231
Optical proximity correction method utilizing serifs having variable dimensions
Inventors:
Thomas Laidig, Kurt E. Wampler
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Jun 11, 2001
Inventors
Thomas Laidig
Kurt E. Wampler
Assignee (at issue)
ASML Masktools Netherlands B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.