Granted Patent
Utility
US 6,670,238 · App. 09/997,660
Method and structure for reducing contact aspect ratios
Inventors:
Scott DeBoer, Vishnu K. Agarwal
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Nov 28, 2001
Inventors
Scott DeBoer
Vishnu K. Agarwal
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.