Granted Patent
Utility
US 6,671,294 · App. 09/918,773
Laser spectral engineering for lithographic process
Inventors:
Armen Kroyan, Ivan Lalovic, Igor V. Fomenkov, Palash P. Das, Richard L. Sandstrom, John M. Algots, Khurshid Ahmed
Patented Case
View Patent ↗
Granted: Dec 30, 2003
Filed: Jul 27, 2001
Inventors
Armen Kroyan
Ivan Lalovic
Igor V. Fomenkov
Palash P. Das
Richard L. Sandstrom
John M. Algots
Khurshid Ahmed
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.