Granted Patent
Utility
US 6,673,148 · App. 10/235,966
Method of using a magnetic field furnace to manufacture semiconductor substrates
Inventors:
Hilton F. Glavish, Hideyuki Isozaki, Keiji Maishigi, Kentaro Fujita
Patented Case
View Patent ↗
Granted: Jan 6, 2004
Filed: Sep 5, 2002
Inventors
Hilton F. Glavish
Hideyuki Isozaki
Keiji Maishigi
Kentaro Fujita
Assignee (at issue)
Ebara Solar, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.