IP Library › Granted Patent US 6,677,238
Granted Patent Utility
US 6,677,238 · App. 10/425,622

System and methods for fabrication of a thin film pattern

Inventor: Shunichi Seki
Patented Case View Patent ↗
Granted: Jan 13, 2004 Filed: Apr 30, 2003
Inventor
Shunichi Seki
Assignee (at issue)
SEIKO EPSON CORPORATION

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Quick Facts
Patent No.
US 6,677,238
App. No.
10/425,622
Filed
2003-04-30
Granted
2004-01-13
Kind
B2