Granted Patent
Utility
US 6,677,695 · App. 10/244,630
MEMS electrostatic actuators with reduced actuation voltage
Inventors:
Vijayakumar R. Dhuler, Edward A. Hill
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Sep 17, 2002
Inventors
Vijayakumar R. Dhuler
Edward A. Hill
Assignee (at issue)
JDS Uniphase Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.