IP Library › Granted Patent US 6,677,695
Granted Patent Utility
US 6,677,695 · App. 10/244,630

MEMS electrostatic actuators with reduced actuation voltage

Inventors: Vijayakumar R. Dhuler, Edward A. Hill
Patented Case View Patent ↗
Granted: Jan 13, 2004 Filed: Sep 17, 2002
Inventors
Vijayakumar R. Dhuler
Edward A. Hill
Assignee (at issue)
JDS Uniphase Corporation

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Quick Facts
Patent No.
US 6,677,695
App. No.
10/244,630
Filed
2002-09-17
Granted
2004-01-13
Kind
B2