IP Library › Granted Patent US 6,678,058
Granted Patent Utility
US 6,678,058 · App. 10/039,249

Integrated alignment and calibration of optical system

Inventors: Leo Baldwin, Frank G. Evans
Patented Case View Patent ↗
Granted: Jan 13, 2004 Filed: Oct 24, 2001
Inventors
Leo Baldwin
Frank G. Evans
Assignee (at issue)
Electro Scientific Industries, Inc.

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Quick Facts
Patent No.
US 6,678,058
App. No.
10/039,249
Filed
2001-10-24
Granted
2004-01-13
Kind
B2