Granted Patent
Utility
US 6,678,240 · App. 10/247,270
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
Inventors:
Bernd Geh, Paul Graupner, Klaus Wurmbrand, Thomas Stammler, Dirk Stenkamp, Jochen Stuhler
Patented Case
View Patent ↗
Granted: Jan 13, 2004
Filed: Sep 19, 2002
Inventors
Bernd Geh
Paul Graupner
Klaus Wurmbrand
Thomas Stammler
Dirk Stenkamp
Jochen Stuhler
Assignee (at issue)
Carl Zeiss SMT GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.