IP Library › Granted Patent US 6,680,540
Granted Patent Utility
US 6,680,540 · App. 09/799,533

Semiconductor device having cobalt alloy film with boron

Inventors: Hiroshi Nakano, Takeyuki Itabashi, Haruo Akahoshi
Patented Case View Patent ↗
Granted: Jan 20, 2004 Filed: Mar 7, 2001
Inventors
Hiroshi Nakano
Takeyuki Itabashi
Haruo Akahoshi
Assignee (at issue)
HITACHI, LTD.

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Quick Facts
Patent No.
US 6,680,540
App. No.
09/799,533
Filed
2001-03-07
Granted
2004-01-20
Kind
B2