IP Library › Granted Patent US 6,680,794
Granted Patent Utility
US 6,680,794 · App. 10/264,318

Polarization beam splitter for photolithography

Inventors: James McClay, Ronald A. Wilklow, Matthew Gregoire
Patented Case View Patent ↗
Granted: Jan 20, 2004 Filed: Oct 4, 2002
Inventors
James McClay
Ronald A. Wilklow
Matthew Gregoire
Assignee (at issue)
ASML Holding N.V.

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Quick Facts
Patent No.
US 6,680,794
App. No.
10/264,318
Filed
2002-10-04
Granted
2004-01-20
Kind
B2