Granted Patent
Utility
US 6,683,011 · App. 09/992,173
Process for forming hafnium oxide films
Inventors:
Ryan C. Smith, Tiezhong Ma, Stephen A. Campbell, Wayne L. Gladfelter
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Nov 14, 2001
Inventors
Ryan C. Smith
Tiezhong Ma
Stephen A. Campbell
Wayne L. Gladfelter
Assignee (at issue)
Regents of the University of Minnesota
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.