Granted Patent
Utility
US 6,683,308 · App. 10/336,766
Method and apparatus for measuring thickness of thin film
Inventors:
Yosuke Itagaki, Keizo Yamada, Takeo Ushiki
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Jan 6, 2003
Inventors
Yosuke Itagaki
Keizo Yamada
Takeo Ushiki
Assignee (at issue)
Fab Solutions, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.