Granted Patent
Utility
US 6,683,729 · App. 09/451,505
Objective with crystal lenses and projection exposure equipment for microlithography
Inventor:
Karl-Heinz Schuster
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Nov 30, 1999
Inventor
Karl-Heinz Schuster
Assignee (at issue)
CARL ZEISS
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.