Granted Patent
Utility
US 6,686,101 · App. 10/198,332
Non absorbing reticle and method of making same
Inventor:
Andrew W. McCullough
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Jul 17, 2002
Inventor
Andrew W. McCullough
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.